SUNY RSFQ Cell Library

LAYER LEGEND

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Color Layer Name Layer Description
Yellow   M0 Holes in the lower ground plane
Magenta/Pink   I0 Via between M1 and M0
Red   M1 First wiring layer
Blue   M2 Second wiring layer
Green   R2 Resistors
Cyan   I1A Josephson junction definition
Gray/White   I1B Via between M2 and either M1, or R2, or I1A
Pink/Magenta   I2 Via between M2 and M3
Gray   M3 Third wiring level (or ground plane)

The layer notation corresponds to HYPRES' Nb-trilayer process:

HYPRES
Process Cross-section

Layer R3 (gold metalization) is used only for contact pads and is not used in our library.

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K. Likharev